Method for manufacturing an electromagnetic conversion device and a displacement detector which uses an electromagnetic conversion device
US5551586A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1994 |
| Grant date | Sep 3, 1996 |
| Priority date | — |
| Expiry date | Aug 24, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N59/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of manufacturing a magneto-electric conversion device having a large rate of change of magnetic resistance and which is easy to position with respect to a magnetized surface, and a moving subject displacement detector using a magneto-electric conversion device manufactured by that method. A magnet which rotates together with the rotation of a drive gear is magnetized in alternately differing north and south poles, arranged in an equal sized section from a center portion thereof. An IC chip is positioned opposite to and at a distance from the magnetized surface of the magnet. Magneto-electric conversion devices are located on the IC chip. These magneto-electric conversion devices are formed by repeated alternate depositions, onto a surface of a single-crystal silicon substrate, of magnetic cobalt films having a thickness of several to several tens of angstroms and non-magnetic copper films having a thickness of several to several tens of angstroms.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.