Mass spectrometer having an ICP source

US5552599A · kind A · utility

Assignee

• Finnegan MAT GmbH · DE

Inventors

• Ulrich Giessmann · Bremen, DE
• Gerhard Jung · Delmenhorst, DE
• Curt Brunnee · Ritterhude, DE

Key dates

• Filing date: Sep 30, 1994
• Grant date: Sep 3, 1996
• Expiry date: Sep 30, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01J49/105
• WIPO field: Electrical machinery, apparatus, energy
• WIPO sector: Electrical engineering

Abstract

A mass spectrometer includes an inductive coupled plasma source whose flame is near ground potential, an interface, a flight tube, and an analyzer that includes magnetic and electric sectors, and an ion detector, which detector is operated at high voltage for ion acceleration. The magnetic sector includes a magnet and pole pieces that are insulated electrically relative to the flight tube. The pressure within the interface preferably does not exceed 10.sup.-3 mbar. By varying the magnetic field and the acceleration potential, identification of a specified mass over defined time intervals is carried out. The disclosed mass spectrometer provides improved coupling between the plasma ion source and a double-focussing analyzer, while advantageously providing a low voltage regime for the plasma source.