Electro-micro-mechanical shutters on transparent substrates
US5552925A · kind A · utility
260Cited by
4References
28Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 7, 1993 |
| Grant date | Sep 3, 1996 |
| Priority date | — |
| Expiry date | Sep 7, 2013 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG09G2300/08
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A micro-mechanical shutter array using micro-mechanical technology and silicon-on-transparent-substrate technology. The micro-mechanical shutter array is operated by using electro-static forces. Two basic types of shutter movements are described, viz. an electric force/electric counter-force and an electric force/mechanical (spring) counter-force.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.