Force sensor and a method for manufacturing a force sensor

US5553506A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Gerhard Benz · Eppelheim, DE
• Franz Laermer · Stuttgart, DE
• Andrea Schilp · Schwäbisch Gmünd, DE
• Erich Zabler · Blankenloch, DE
• Jurgen Schirmer · Heidelberg, DE
• Werner Uhler · Bruchsal, DE

Key dates

• Filing date: Sep 8, 1994
• Grant date: Sep 10, 1996
• Expiry date: Sep 8, 2014

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S148/159
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a force sensor, a resonator is mounted by means of a dielectric layer on a bending element. Deformation of the bending element changes the resonant frequency of the resonator.