Method for making a vertical resonant surface-emitting micro-laser
US5554061A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 19, 1994 |
| Grant date | Sep 10, 1996 |
| Priority date | — |
| Expiry date | Dec 19, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01S2301/176
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is a vertical resonant surface-emitting laser, and more particularly, a method for making a micro-laser that can be emitted to the upper surface of resonance structures by forming electrodes on the side surface of the resonance structures. By forming the electrodes injecting the current to the active layer on the side surface of resonators, the electrodes may be formed more easily on the fine micro-laser. Moreover, the current is more efficiently injected to the inside the active layer due to the side electrode surrounding an upper glass layer and emitter, and the laser may be operated even with a smaller start current, and serial resistance of the resonators may be reduced.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.