Method and apparatus using organic vapor phase deposition for the growth of organic thin films with large optical non-linearities
US5554220A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 19, 1995 |
| Grant date | Sep 10, 1996 |
| Priority date | — |
| Expiry date | May 19, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC30B29/54
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
In a method using organic vapor phase deposition (OCPD), for the growth of thin films of optically nonlinear organic salts, a volatile precursor of each component of the salt is carried as a vapor to a hot-wall reaction chamber by independently controlled streams of carrier gas. The components react to form a polycrystalline thin film on substrates of glass and gold. Excess reactants and reaction products are purged from the system by the carrier gas. For example, the method provides the growth of polycrystalline, optically nonlinear thin films of 4'-dimethylamino-N-methyl-4-stilbazolium tosylate (DAST) with >95% purity.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.