Method for improving adhesion to a spin-on-glass
US5554567A · kind A · utility
49Cited by
8References
12Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Sep 1, 1994 |
| Grant date | Sep 10, 1996 |
| Priority date | — |
| Expiry date | Sep 1, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/3105
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A method is described for eliminating problems of adhesion, including peeling and blistering, between the surface of a cured spin- on-glass layer and a second deposited layer of a different material. After curing, and prior to the deposition of the second layer, the layer of spin-on-glass is subjected to a short heat treatment in vacuum. The second layer is then deposited without breaking the vacuum.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.