Forming polyimide coating by screen printing
US5554684A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Dec 16, 1994 |
| Grant date | Sep 10, 1996 |
| Priority date | — |
| Expiry date | Dec 16, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L2924/0002
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Disclosed is a method of forming a polyimide coating in a pattern on a surface. A first solution is prepared of an organic solvent, and diamine and dianhydride monomers. The monomers are polymerized to form a polyamic acid that is soluble in the organic solvent. About 10 to about 95% of the amic acid groups in the polyamic acid are imidized, forming a partially imidized polyamic acid. A more concentrated solution of the partially imidized polyamic acid is prepared and about 0.1 to about 10 wt % of a thixotrope is mixed with the more concentrated solution to form a paste. A template is placed over the surface and the paste is forced through the template onto the surface. The solvent is evaporated and the partially imidized polyamic acid on the surface is fully imidized.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.