Parallel plane holding mechanism and apparatus using such a mechanism
US5554851A · kind A · utility
26Cited by
8References
13Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 20, 1995 |
| Grant date | Sep 10, 1996 |
| Priority date | — |
| Expiry date | Mar 20, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A parallel plane holding mechanism is constructed as follows. Beams are provided on the peripheral portion of a flat plate-shaped weight member. A base plate is provided so as to face the weight member. First and second electrodes are provided on both surfaces of the weight member and the base plate to face each other. A voltage is applied between the first electrode and the second electrode so that the distance between the weight member and the base plate is controlled to move the weight member to thereby hold a reference surface of the weight member to be parallel to a predetermined reference surface.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.