Hybrid metal/metal oxide electrodes for ferroelectric capacitors

US5555486A · kind A · utility

Assignee

• North Carolina State University · US

Inventors

• Angus Kingon · Cary, US
• Husam N. Al-Shareef · Boise, US
• Orlando H. Auciello · Bolingbrook, US
• Ken D. Gifford · Raleigh, US
• Dan J. Lichtenwalner · Raleigh, US
• Rovindra Dat · Dallas, US

Key dates

• Filing date: Dec 29, 1994
• Grant date: Sep 10, 1996
• Expiry date: Dec 29, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10D1/68

Abstract

Ferroelectric capacitors with hybrid electrodes including both a conducting oxide and a noble metal may be used to achieve devices having improved performance over capacitors with either platinum or ruthenium oxide electrodes. These hybrid electrode structures can improve capacitor performance both in terms of fatigue and leakage current. Accordingly, these ferroelectric capacitors with hybrid electrodes can be used as elements of an integrated circuit such as a non-volatile memory or dynamic random access memory.