Transport device for substrates to be coated in a vacuum coating system

US5556477A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Herbert Nahring · Rodenbach, DE
• Hans Wolf · Niederrodenbach, DE
• Jurgen Mulderer · Alzenau, DE

Key dates

• Filing date: May 24, 1995
• Grant date: Sep 17, 1996
• Expiry date: May 24, 2015

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C14/566
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

A substrate carrier plate (17, 17a) designed to hold at least one substrate is removably attached to a support element (19, 19a) of a base (2). The carrier plate is held to the support element (19, 19a) at least at one point by a centering pin (22, 23; 22a, 23a), which projects from the plate of the support element (19) and fits into a hole (24, 25) in the substrate carrier plate (17), and at least at one other point by a clamping device (18, 18a). The clamping device (18, 18a) is held on a control part (11) on the base (2) in such a way that it can be moved by the displacement of an actuating arm (21) between a clamping position and a release position, and it is also provided with a tensioning roller (14), which is supported on a ramp (15, 15a) on the substrate carrier plate (17). The substrate carrier plate (17) has an opening (20, 20a) to allow the passage of the tensioning roller (14), the tensioning roller (14, 14a) being located behind this opening when in its release position. A kickover spring (9) holds the tensioning rollers (14, 14a) under pretension in one stable position when in the tensioning position and under pretension in another stable position when in the release …