Combustion chamber pressure transducer and method of making same
US5559280A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Nov 14, 1994 |
| Grant date | Sep 24, 1996 |
| Priority date | — |
| Expiry date | Nov 14, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L23/18
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A transducer housing for mounting a port in a combustion chamber has a metal diaphragm exposed to the combustion gasses. The pressure of the combustion gasses deflects the diaphragm which locally deflects a simply supported beam. The beam is formed of refractory material having epitaxially grown crystalline piezoresistors formed on one surface of the beam and connected in a bridge circuit. Noble metal foil leads connect to the piezoresistors to form the bridge and provide attachment pads. The pads are noble metal welded to other noble metal foil pads provided on a ceramic substrate to form a sensor subassembly for mounting adjacent the diaphragm to form a transducer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.