Opto-electro-mechanical device or filter, process for making, and sensors made therefrom
US5559358A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 23, 1994 |
| Grant date | Sep 24, 1996 |
| Priority date | — |
| Expiry date | May 23, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P2015/0828
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to microstructures fabricated from semiconductor material and having a flexible member which is excited into various modes of resonance and in which such resonance is read optically. By coupling the microstructure to a surface or material of interest, a drive means will excite the flexible member into a characteristic resonance which when read optically gives indication of certain physical phenomena influencing the surface or material of interest. The microstructures of the present invention may be configured to self-resonate, as a so-called active device, under certain conditions. Many different physical phenomena may be quantified using the device of the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.