Fabrication of electronically conducting polymeric patterns
US5561030A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 29, 1994 |
| Grant date | Oct 1, 1996 |
| Priority date | — |
| Expiry date | Apr 29, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S430/168
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Thin films of substantially pure soluble polythiophenes and oligothiophenes undergo cross-linking and insolubilization upon irradiation with UV/visible light, without additives. Irradiation of thin polymer films through a photomask and subsequent development with solvent leaves a polymeric image of the mask. The resulting .pi.-conjugated polymeric pattern can be rendered electronically conducting by oxidation. The electronic conductivity of these films is high and is similar to that found for oxidized, non-irradiated films. Furthermore, the conductivity can be regulated over eight orders of magnitude by controlled oxidation. Thus, the fabrication of electronically conducting, organic "wires" or "channels" using conventional semiconductor photolithographic techniques can be achieved.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.