Patent · US Expired

Coated quartz glass component

US5562774A · kind A · utility

32Cited by

0References

9Claims

0Family size

Assignee

HERAEUS QUARZGLAS GMBH & CO. KG · DE

Inventors

Poul E. Breidenbach · Bruchköbel, DE
Dietmar Hellmann · Gelnhausen, DE
Helmut Leber · Hanau, DE

Key dates

Filing date	Jul 25, 1995
Grant date	Oct 8, 1996
Priority date	—
Expiry date	Jul 25, 2015

Classification

Technology area (CPC Y)Emerging Cross-Sectional Technologies
CPC primaryY10S156/914
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

Quartz glass component having a coating with a silicon carbide surface includes a gradient layer of silicon carbide and at least one additional constituent which is less hard and has a lower modulus of elasticity than silicon carbide and whose concentration decreases across the thickness of the layer from inside to outside. The coated component has good thermal-shock resistance and long-term stability in terms of its chemical resistance to hydrofluoric acid and nitric acid as well as to a mixture of these two acids.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.