Thin film magnetic head, process for production thereof
US5567333A · kind A · utility
46Cited by
3References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 22, 1994 |
| Grant date | Oct 22, 1996 |
| Priority date | — |
| Expiry date | Jun 22, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG11B5/3163
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A magnetic head element has one or more rails formed on the surface thereof. Each rail is formed so as to have a tapered angle of 55.degree.-85.degree.. To form such a rail, ion milling is conducted; the rail substrate used is allowed to have an inclination angle to 15.degree.-60.degree. and is rotated; and there is used, as the ion milling gas, a fluorinated hydrocarbon (e.g. CH.sub.2 FCF.sub.3) gas alone or a mixed gas of said fluorinated hydrocarbon gas and Ar, SF.sub.6 or the like. Accordingly, a magnetic head rail shape gives a small variation in flying height between magnetic head and magnetic disc.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.