Method and apparatus utilizing an optical stage for topographic surface analysis

US5568256A · kind A · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Klaus Körner · Berlin, DE
• Fritz Holger · Berlin, DE
• Lajos Nyarsik · Berlin, DE
• Gunter Spur · Berlin, DE
• Eckart Uhlmann

Key dates

• Filing date: Apr 21, 1994
• Grant date: Oct 22, 1996
• Expiry date: Apr 21, 2014

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B9/025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A method and apparatus for topographic surface analysis including at least ne light source for radiating light, a first light-distributing surface of a first diffraction grating for receiving light from the at least one light source and for reflecting a first bundle of light under normal optical conditions and a second bundle of light formed by diffraction of the first order. A first optical stage is provided for projecting the first and second bundles from the first light-distributing surface in an optically conjugated form onto an object surface to be analyzed of a sample. Light representing the object surface is sharply projected via the first optical stage onto a second light-distributing surface of a second diffraction grating. A second optical stage projects diffracted bundles of light from the second light-distributing surface onto a detector which detects radiation and enables topographic analysis of the object surface.