Semiconductor cleaning apparatus and wafer cassette
US5568821A · kind A · utility
16Cited by
7References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 17, 1995 |
| Grant date | Oct 29, 1996 |
| Priority date | — |
| Expiry date | Jul 17, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldChemical engineering
- WIPO sectorChemistry
Abstract
A semiconductor cleaning apparatus includes a cassette loader/unloader for moving a cassette; a product loader/unloader for loading a wafer into and unloading a wafer from a cassette; a cleaner for cleaning a wafer; a water cleaner for cleaning with water a wafer that has been cleaned in the cleaner; a dryer for drying the wafer that has been cleaned with water in the water cleaner; and a conveyance having a wafer grasping hand for directly holding a wafer unloaded from a cassette and sequentially conveying the wafer held by the wafer hand to the cleaner, the water cleaner, and the dryer.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.