Method of manufacturing a frame-mounted membrane

US5569855A · kind A · utility

Assignee

• Forschungszentrum Karlsruhe GmbH · DE

Inventors

• Werner Schomburg · Remchingen, DE
• Richard Rapp · Blankenloch, DE
• Klaus Kadel · Wittmund, DE

Key dates

• Filing date: Jun 19, 1995
• Grant date: Oct 29, 1996
• Expiry date: Jun 19, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G03F7/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

In a method of manufacturing frame-mounted membranes, a first membrane layer is formed on a substrate and openings are formed in this membrane layer which are then covered by a second membrane layer, a frame structure is formed on the membrane layers around the openings and the membrane layers with the frame structure are separated from the substrate to provide the frame-mounted membranes.