Probe holder and probe mounting method for a scanning probe microscope

US5569918A · kind A · utility

Assignee

• RHK Technology, Inc. · US

Inventor

• Zhouhang Wang · Troy, US

Key dates

• Filing date: Mar 17, 1995
• Grant date: Oct 29, 1996
• Expiry date: Mar 17, 2015

Classification

• Technology area (CPC Y): Emerging Cross-Sectional Technologies
• CPC primary: Y10S977/873
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A probe holder non-rotatingly mountable in a support bracket releasibly receives a scanning microscope probe. Guide rods extend outward from the probe holder on the scan head and engage bores formed in the other of the probe holder and the scan head during closure of the scan head with the probe holder to co-axially align the probe with a probe receiver in the scan head. Transversely extending arms on a spindle attached to a scan head slide along ramp surfaces in the scan head to a fixed stop to rotationally position the scan head. Complementary surfaces on the spindle and a stationarily affixed sleeve co-axially center the scan head with the scan head support structure and the probe holder. A method of co-axially and rotationally aligning a probe for exchange between a scan head and a probe holder is disclosed using the guide rods and guide bores, the spindle arms, ramp and stop surfaces and the complementary surfaces on the spindle and the stationary sleeve, and a non-rotatable probe holder mount. The alignment structure and method are also applied to a sample holder.