Microfabricated acoustic source and receiver
US5569968A · kind A · utility
59Cited by
13References
39Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 14, 1994 |
| Grant date | Oct 29, 1996 |
| Priority date | — |
| Expiry date | Sep 14, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R17/08
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
A microstructure that may be used as an acoustic source or receiver. It comprises a substrate having a thicker section and a thinner section, supporting a membrane. A window is formed in the thinner section. Means are provided for inputting or sensing mechanical energy in the substrate and membrane. The microstructure allows for the design of complex mechanical frequency responses for at least partly mechanical signal processing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.