Electron-emitting device and electron beam lithograph machine and image display apparatus making use of it
US5569974A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 12, 1994 |
| Grant date | Oct 29, 1996 |
| Priority date | — |
| Expiry date | Jul 12, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/073
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An electron-emitting device comprises a substrate, an electrode provided on said substrate, an insulating layer laminated on the electrode, and a second electrode having an opening and laminated on the insulating layer in such a manner that the insulating layer is uncovered at the opening and electrons are emitted from the opening of the second electrode as a result of application of an voltage between the electrodes. An image display apparatus comprises the electron-emitting device, a modulating electrode capable of modulating an electron beam emitted from the electron-emitting device, in accordance with an information signal, and an image forming member capable of forming an image as a result of irradiation with the electron beam, these of which are successively disposed. An image forming apparatus comprises the electron-emitting device, and a means for modulating an electron beam emitted from said electron-emitting device, in accordance with an information signal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.