Human guided mobile loader stocker
US5570990A · kind A · utility
134Cited by
15References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 5, 1993 |
| Grant date | Nov 5, 1996 |
| Priority date | — |
| Expiry date | Nov 5, 2013 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A human guided mobile loader stocker developed to mechanically assist in SMIF container movement. The assist includes a pushcart, a semi-motorized transport arm, a processor, and communication devices. A group of containers are placed on the cart using the arm. The cart is pushed to a semiconductor processing tool where the arm is used to transfer containers to and from the port of the processing tool. The processor and communication devices are used for inventory control and guiding the container to the port of the processing tool.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.