Magnet housing for a sputtering cathode
US5571393A · kind A · utility
14Cited by
10References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 24, 1994 |
| Grant date | Nov 5, 1996 |
| Priority date | — |
| Expiry date | Aug 24, 2014 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3405
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A magnetron cathode having a magnet housing which encloses a magnet array and has a cooling fluid passage therethrough. The magnet housing fills a significant portion of the cathode leaving a passage of relatively low cross-section for cooling fluid flow between the magnet housing and a cathode wall. The magnet housing may be hermetically sealed to prevent magnet corrosion and may be provided with rollers which engage the cathode wall to prevent magnet housing deformation due to magnetic forces.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.