Patent · US Expired

Dielectric micromechanical element

US5572076A · kind A · utility

5Cited by

10References

14Claims

0Family size

Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Wolfgang Benecke · Kürten, DE
Bernhard Wagner · Fellbach, DE
Gunter Fuhr · Berlin, DE
Rolf Hagedorn · Berlin, DE
Roland Glaser · Burbank, US
Jan Gimsa · Berlin, DE

Key dates

Filing date	Oct 21, 1991
Grant date	Nov 5, 1996
Priority date	—
Expiry date	Oct 21, 2011

Classification

Technology area (CPC H)Electricity
CPC primaryH02N1/004
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A dielectric micromechanical element the moveable component of which (hereinafter referred to as rotor) is an electrically homogeneous or inhomogeneous dielectric. The rotor is driven via one or more electric field vectors which are generated via electrode arrangements by switched voltages and/or by triggering the electrodes with phase-shifted voltages. On at least one side of the rotor and/or inside the rotor the electrodes form a linear or curved row of electrodes.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.