Laser system with a micro-mechanically moved mirror

US5572543A · kind A · utility

Assignee

• Deutsche Aerospace AG · DE

Inventors

• Stefan Heinemann · Ann Arbor, US
• Axel Mehnert · Schongau, DE
• Walter Kroy · Ottobrunn, DE
• Peter Peuser · Riemerling, DE
• Nikolaus Schmitt · Heidelberg, DE
• Helmut Seidel · Starnberg, DE

Key dates

• Filing date: Nov 29, 1994
• Grant date: Nov 5, 1996
• Expiry date: Nov 29, 2014

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/42
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention provides a laser system with one or several micro-mechnically produced, actively controlled laser mirrors which are provided with an actuation device, so that the rapid manipulation of small laser mirrors is assured. The mirrors are designed so that they permit an economical production in large numbers.