Ceramic articles
US5573690A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 1, 1995 |
| Grant date | Nov 12, 1996 |
| Priority date | — |
| Expiry date | Mar 1, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH05B3/283
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Ceramic articles such as ceramic heaters, ceramic static chucks or the like include a substrate 1, a functional member such as a resistance heating element 2 or the like embedded in the substrate 1, a terminal 12 and a conductive wire 5A arranged therebetween. The conductive wire 5A is connected and fixed to the terminal 12, and a connection portion C between the conductive wire 5A and the terminal 12 is continued thereto. Alternatively, a post portion formed on the terminal 12 is extended in a direction crossing to a thickness direction of a plate-like substrate 1, and an end portion of the resistance heating element 2 is wound around the post portion. Alternatively, an end portion of the resistance heating element 2 is connected to the terminal 3 at a center portion in a thickness direction of the plate-like substrate 1.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.