Integrated circuit capacitor having a conductive trench
US5574621A · kind A · utility
34Cited by
4References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 27, 1995 |
| Grant date | Nov 12, 1996 |
| Priority date | — |
| Expiry date | Mar 27, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D1/68
Abstract
A capacitor (58) for an integrated circuit having a conductive trench (50), disposed below a bottom electrode layer (52), that electrically connects the bottom electrode layer to a semiconductor substrate (14, 16). The conductive trench eliminates the need for a top-side contact to the bottom electrode layer. The semiconductor substrate is, for example, connected to ground.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.