Device for transporting magazines for molding wafer-shaped objects
US5575081A · kind A · utility
33Cited by
6References
13Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Apr 3, 1995 |
| Grant date | Nov 19, 1996 |
| Priority date | — |
| Expiry date | Apr 3, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The object of a device for transporting magazines for holding wafer-shaped objects is to ensure an exchange of gases within a SMIF box to the required extent at low cost and in an effective manner with respect to time in conformity to the working regimen associated with an SMIF system. A gas feed duct proceeding from closable ducts incorporated in the wall opens into gas distributing means. A gas discharge duct communicates with a gas outlet adjacent to the gas distribution means opposite the magazine. The device is preferably used in the fabrication of semiconductor chips.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.