Capacitive transducer with electrostatic actuation
US5576483A · kind A · utility
39Cited by
30References
37Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Nov 14, 1994 |
| Grant date | Nov 19, 1996 |
| Priority date | — |
| Expiry date | Nov 14, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/872
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
High precision force imparting and/or a force (including weight) and displacement measuring/indicating device which includes a multi-plate capacitor transducer system. The transducer may be used for both applying and measuring the applied force during microindentation or micro hardness testing, and for imaging before and after the testing to achieve an atomic force microscope type image of a surface topography before and after indentation testing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.