Method and apparatus for determining crystallographic characteristics
US5576543A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Aug 21, 1995 |
| Grant date | Nov 19, 1996 |
| Priority date | — |
| Expiry date | Aug 21, 2015 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/22
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An apparatus for determining crystallographic characteristics of a specimen having at least one crystal includes an electron beam generator, a beam deflector for adjusting the tilt and azimuth angles of the electron beam relative to the specimen, a stage for holding the specimen, an image collection system for obtaining a plurality of dark field images, a data store, and a processor for processing the dark field images to identify a plurality of crystal lattice planes associated with the crystals. The dark field images are obtained under different electron beam tilt and azimuth deflection conditions. The bright pixels in each dark field image are identified and utilized to determine the spatial location and orientation of the crystal lattice planes and the crystals themselves. An orientation image is produced that represents the orientation of the crystals within the specimen.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.