Pressure sensor with enhanced sensitivity
US5578759A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 31, 1995 |
| Grant date | Nov 26, 1996 |
| Priority date | — |
| Expiry date | Jul 31, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/08
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor having enhanced sensitivity without loss of accuracy over a broad pressure range. The sensor includes a resonator element sandwiched between two hollow end caps to form a sealed assembly. The sidewall thickness of the end caps abutting the resonator element is greater than the sidewall thickness at an area longitudinally spaced from the resonator, and the two dimensions may be selected to enhance sensitivity while maintaining accurate sensor performance. End cap endwalls of non-uniform thickness are employed with the thinnest endwall portion at the center and the thickest at the lateral periphery of the endwall. The rate of increase of end wall thickness toward the periphery may be modified to control the upper end of the pressure range in which the sensor is operable.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.