Method and device for the correction of measurement errors due to vibrations in coordinate measuring devices

US5579246A · kind A · utility

Assignee

• Carl Zeiss Stiftung · DE

Inventors

• Peter Ebersbach · Oberkochen, DE
• Helmut Muller · Bensberg, DE

Key dates

• Filing date: Dec 12, 1994
• Grant date: Nov 26, 1996
• Expiry date: Dec 12, 2014

Classification

• Technology area (CPC G): Physics
• CPC primary: G01B21/045
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

For the correction of measurement errors, due to vibration, of coordinate measuring devices, the time course of the interfering vibrations is stored by means of sensors (a.sub.x, a.sub.y, a.sub.z) on a vibrating portion of the coordinate measuring device. The measured values of the sensors are adjusted with previously determined and stored correction parameters, which describe the natural frequency (.nu.) and the damping constants (.delta.) of the vibrations and also the amplitude and phase information of the characteristic modes (G.sub.r) of the vibrations contributing to the interfering vibrations. The measurement errors, due to vibration, of the coordinate measuring device at the instant of probing are then calculated from the time course of the corrected measurement values of the sensors (a.sub.x, a.sub.y, a.sub.z).