Carbide and carbonitride surface treatment method for refractory metals
US5580397A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jan 26, 1995 |
| Grant date | Dec 3, 1996 |
| Priority date | — |
| Expiry date | Jan 26, 2015 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C8/30
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A carbide and carbonitride surface treatment method for refractory metals is provided, in steps including, heating a part formed of boron, chromium, hafnium, molybdenum, niobium, tantalum, titanium, tungsten or zirconium, or alloys thereof, in an evacuated chamber and then introducing reaction gases including nitrogen and hydrogen, either in elemental or water vapor form, which react with a source of elemental carbon to form carbon-containing gaseous reactants which then react with the metal part to form the desired surface layer. Apparatus for practicing the method is also provided, in the form of a carbide and carbonitride surface treatment system (10) including a reaction chamber (14), a source of elemental carbon (17), a heating subassembly (20) and a source of reaction gases (23). Alternative methods of providing the elemental carbon (17) and the reaction gases (23) are provided, as well as methods of supporting the metal part (12), evacuating the chamber (14) with a vacuum subassembly (18) and heating all of the components to the desired temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.