Wafer transfer apparatus for use in a film deposition furnace
US5582649A · kind A · utility
1Cited by
6References
7Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 29, 1996 |
| Grant date | Dec 10, 1996 |
| Priority date | — |
| Expiry date | Feb 29, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/14
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A boat, carrying wafers to be processed, is pushed into a furnace by a substantially elongated and cantilevered actuator arm having a lug that pushes by first rotating the arm, to cause the lug to traverse a vertical rod attached to against a plate affixed to the boat. The boat is later pulled out of the furnace the boat, and thereafter pulling on the arm to enable the lug to pull against the vertical rod to withdraw the boat. Reliable operation is attained regardless of sagging of the actuator arm relative to the boat.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.