Microminiature gas chromatograph
US5583281A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 7, 1995 |
| Grant date | Dec 10, 1996 |
| Priority date | — |
| Expiry date | Jul 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2030/205
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microminiature gas chromatograph (.mu.GC) comprising a least one silicon wafer, a gas injector, a column, and a detector. The gas injector has a normally closed valve for introducing a mobile phase including a sample gas in a carrier gas. The valve is fully disposed in the silicon wafer(s). The column is a microcapillary in silicon crystal with a stationary phase and is mechanically connected to receive the mobile phase from the gas injector for the molecular separation of compounds in the sample gas. The detector is mechanically connected to the column for the analysis of the separated compounds of sample gas with electronic means, e.g., ion cell, field emitter and PIN diode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.