Layered diaphragm pressure sensor with connecting channel

US5583296A · kind A · utility

Assignee

• Max-Planck-Gesellschaft zur Föderung der Wissenschaften e.V. · US

Inventors

• Wilfried Mokwa · Krefeld, DE
• Michael Kandler · Birkenfeld, DE
• Jorg Amelung · Krefeld, DE

Key dates

• Filing date: May 17, 1995
• Grant date: Dec 10, 1996
• Expiry date: May 17, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L15/00
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor comprises a substrate and a layer defining together with said substrate a pressure sensor cavity, said layer including a diaphragmlike area which is adapted to be acted upon by an external pressure. A micro-miniaturizable pressure sensor of the above-mentioned type, which is used for differential pressure measurement or for relative pressure measurement, is provided on the basis of the features that said cavity is followed by a channel which extends along the surface of said substrate, said channel comprising a layered structure including also the layer which also defines the diaphragmlike area of the pressure sensor, the ratio of the width of the channel to the thickness of the layered structure above the channel being smaller than the ratio of the smallest extension of the diaphragmlike area in the diaphragm plane to the thickness of the diaphragmlike area.