Patent · US Expired

Connector arrangement for a semiconductor memory device

US5583356A · kind A · utility

12Cited by
1References
5Claims
0Family size

Assignee

Inventors

Key dates

Filing dateNov 29, 1993
Grant dateDec 10, 1996
Priority date
Expiry dateNov 29, 2013

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10B12/31

Abstract

In a semiconductor memory device having a novel structure of a wiring layer and a large capacitance capacitor and the manufacturing method therefor, on the transistor formed on the semiconductor substrate, a first conductive layer is formed extending along with the gate electrode of the transistor and connecting with the gate electrode, a storage electrode of a capacitor is formed on the first conductive layer by interposing the insulation film between the first conductive layer and the source region of the transistor, and a second conductive layer is formed in connection with the first conductive layer at a portion between memory cell array and the peripheral circuit region. Storage electrodes can be made thicker without affecting to the step-difference between memory cells and the peripheral circuit region, so that a more reliable semiconductor memory device with a capacitor having a larger capacitance can be realized.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.