Optical device for checking the flatness and smoothness of a surface
US5583639A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Dec 19, 1994 |
| Grant date | Dec 10, 1996 |
| Priority date | — |
| Expiry date | Dec 19, 2014 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/306
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Device for checking of flatness and smoothness of an item (10) comprising components for measuring of flatness with an interference method and for measuring of smoothness with a reflection method, where the item (10) or a mirror (23) close to the item can be tilted in two directions until stripes of an interference pattern created on a first image plane (14) have a predetermined distance and a predetermined general direction, the deviations from flatness being calculated from the distance and curvature of the stripes, and the smoothness being calculated from the brightness variations in the mirror image created by the reflection method on a second image plane (22).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.