Two-stage positive displacement pump
US5584669A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 24, 1995 |
| Grant date | Dec 17, 1996 |
| Priority date | — |
| Expiry date | Jan 24, 2015 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04D25/16
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A two-stage positive displacement pump (1) is used in particular to operate in conjunction with a turbomolecular pump (2) that can be placed ahead of it in series. The two-stage positive displacement pump (1) is configured as a hybrid pump (3) that has on the medium-entry side a reciprocating pump (5) with a comparatively large displacement area (6), whereby its piston-cylinder space (7) is sealed off with respect to the crank area (8) by means of a sealing membrane (9). Also as a part of this two-stage positive displacement pump (1) which forms the hybrid pump (3), there is placed in series behind the reciprocating pump (5) a diaphragm pump (10), whose displacement area (11) is noticeably smaller compared to that of the reciprocating pump (5).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.