Counterflow leak-detector unit with a high-vacuum pump

US5585548A · kind A · utility

Assignee

• Leybold GmBH · DE

Inventors

• Werner Grosse Bley · Bonn, DE
• Thomas Böhm · Zorneding, DE

Key dates

• Filing date: Feb 14, 1995
• Grant date: Dec 17, 1996
• Expiry date: Feb 14, 2015

Classification

• Technology area (CPC G): Physics
• CPC primary: G01M3/202
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A counterflow leak-detector unit (1) with an inlet (2) connected to a test specimen, or a chamber housing a test specimen. A high-vacuum pump (4) produces pressure in a test-gas detector. The inlet (2) to the leak-detector unit is connected to an intermediate line (16) in the high-vacuum pump (4). To increase detection sensitivity without any danger of the pressure in the detector rising to inadmissible levels, a constriction (17) is located between two high-vacuum pump states (5, 6) of the high vacuum pump (4). Pump stages (5, 6) are separated by the intermediate line (16). The inlet (2) to the leak-detector unit (1) is connected to the outlet side of the high-vacuum pump state (5) at a point upstream of the constriction (17).