Patent · US Expired

Composition, and method for using same, for etching metallic alloys from a substrate

US5587103A · kind A · utility

7Cited by
3References
12Claims
0Family size

Assignee

Inventor

Key dates

Filing dateJan 17, 1996
Grant dateDec 24, 1996
Priority date
Expiry dateJan 17, 2016

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC23F1/44
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

A composition for optimally removing or etching metallic alloys from chemically compatible substrates with minimal damage to the substrate. The preferred composition is Ammonium Fluoride, Hydrofluoric Acid, Nitric Acid, Phosphoric Acid and Water in a specified range of quantities used to selectively remove an Aluminum and Silicon Alloy and Titanium film from a chemically compatible substrate. The composition is placed in contact with Stainless Steel, Silicon, or other organic or metallic substrates to remove, etch, or pattern homogenous or layered Aluminum, Silicon, Titanium and Copper Alloys from the substrate with minimal etching to the underlying substrate.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.