Semiconductor strain gauge acceleration sensor
US5587531A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1995 |
| Grant date | Dec 24, 1996 |
| Priority date | — |
| Expiry date | Jul 11, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01P15/123
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An acceleration sensor includes an acceleration detecting element (15) for detecting an acceleration in a sealed case (11), silicon oil (16) with which the case (11) is filled for giving damping to the acceleration detecting element (15), and a deformable sealed enclosure (20) which is mounted in the case (11) and is filled with gas. A change in volume of the silicon oil (16) caused by a change in temperature of the silicon oil (16) is counteracted by the deformation of the sealed enclosure (20). The deformation of the sealed enclosure may include variations in the height and pitch of wave shapes defined by a diaphragm portion of the sealed enclosure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.