Apparatus and method for inspecting a crystal
US5588034A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Apr 21, 1995 |
| Grant date | Dec 24, 1996 |
| Priority date | — |
| Expiry date | Apr 21, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N23/20
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An apparatus for inspecting single crystal specimens comprises an x-ray generator which supplies x-rays to a collimator. The collimator has a matrix of apertures to produce a plurality of parallel x-ray beams which are directed onto a surface of the specimen. An x-ray detector detects the x-ray beams diffracted from the surface of the specimen, corresponding to each of the parallel x-ray beams. At each symmetry pole of an overall Laue pattern an accurately predictable pattern of spots is produced on the x-ray detector, if the orientation and shape of the specimen crystal is known. Each spot corresponds to where one of the diffracted beams strikes the detector. A disarrangement of one or more of the spots indicates a difference in crystal orientation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.