Patent · US Expired

Infrared detection device comprising a pyroelectric thin film and method for fabricating the same

US5589687A · kind A · utility

7Cited by
3References
11Claims
0Family size

Assignee

Inventors

Key dates

Filing dateMar 30, 1995
Grant dateDec 31, 1996
Priority date
Expiry dateMar 30, 2015

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01J5/34
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

An infrared detection device has a substrate with a plurality of hollow mesas and a pyroelectric thin film formed on the surface having the mesas.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.