Infrared detection device comprising a pyroelectric thin film and method for fabricating the same
US5589687A · kind A · utility
7Cited by
3References
11Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 30, 1995 |
| Grant date | Dec 31, 1996 |
| Priority date | — |
| Expiry date | Mar 30, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01J5/34
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
An infrared detection device has a substrate with a plurality of hollow mesas and a pyroelectric thin film formed on the surface having the mesas.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.