Infrared detector with Fabry-Perot interferometer
US5589689A · kind A · utility
61Cited by
6References
20Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 7, 1995 |
| Grant date | Dec 31, 1996 |
| Priority date | — |
| Expiry date | Jul 7, 2015 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/001
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The invention relates to a silicon micromechanically fabricated infrared detector having an infrared radiation absorbing layer (7, 44) deposited on an insulating substrate and a detector (11, 24, 25) for detecting the amount of radiation absorbed in the metallic absorbing layer. According to the invention, on the path of the radiation, prior to the absorbing layer (7, 44) is located an electrically controllable Fabry-Perot interferometer (1, 2, 5) manufactured by silicon micromechanical techniques and having the absorbing layer (7, 44) integrally coupled with one of the mirrors (1, 2) thereof).
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.