Integrated varactor switches for acoustic ink printing
US5589864A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Sep 30, 1994 |
| Grant date | Dec 31, 1996 |
| Priority date | — |
| Expiry date | Sep 30, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S148/014
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
An integrated varactor and piezoelectric device for an acoustic ink jet ejector includes a substrate having a first surface, the silicon substrate forming a first electrode, an epitaxial layer formed over the first surface of the silicon substrate, a silicon dioxide layer formed over the epitaxial layer, a second electrode formed over the silicon dioxide, a piezoelectric layer formed over the second electrode, a third electrode formed over the piezoelectric layer and an acoustic lens formed over a second surface of the silicon substrate. The acoustic lens is aligned with the center of the piezoelectric layer generally along an axis perpendicular to the first and second surfaces of the silicon substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.