Manifold systems for high purity chemical delivery systems
US5590695A · kind A · utility
72Cited by
25References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 7, 1995 |
| Grant date | Jan 7, 1997 |
| Priority date | — |
| Expiry date | Jun 7, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T137/7368
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A highly reliable digital level sensor assembly is provided to replace optical and capacitance type sensors in high purity chemical delivery systems. The digital level sensor assembly is particularly useful in bulk chemical refill delivery systems for high purity chemicals employing a manifold that ensures contamination free operation and canister change outs with a minimum of valves and tubing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.