Rotary chemical treater having stationary cleaning fluid nozzle
US5591262A · kind A · utility
Assignees
Inventors
Key dates
| Filing date | Mar 24, 1995 |
| Grant date | Jan 7, 1997 |
| Priority date | — |
| Expiry date | Mar 24, 2015 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
The invention disclosed defined a vertically extending passage through the rotary center of an inner cup or the rotary center of a spinner in a notary chemical treater, disposes a stationary cleaning fluid nozzle in the passage, and injects the cleaning fluid from the nozzle to clean a lid of the rotary chemical treater and the underside of an object treatment within the treater. The underside of the lid and the underside of the objective part are efficiently cleaned, and the need for sealing the movable parts against the cleaning fluid is eliminated because the nozzle is stationary, ensuring the prevention of the cleaning fluid from leaking.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.