Patent · US Expired

Apparatus for affixing a rotating cylindrical magnetron target to a spindle

US5591314A · kind A · utility

21Cited by

7References

9Claims

0Family size

Inventors

Steven V. Morgan · Windsor, US
Johan Vanderstraeten · Drongen, BE
Erwin Vanderstraeten · Gentbrugge, BE
Guy Gobin · Oostende, BE

Key dates

Filing date	Oct 27, 1995
Grant date	Jan 7, 1997
Priority date	—
Expiry date	Oct 27, 2015

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/3407
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

An apparatus to releasably affix a rotating cylindrical magnetron target to a spindle utilizes a threaded spindle collar engaging threads on the outside surface of the target, with a single water-to-vacuum seal located at the target and spindle interface. The threads may be removable from the target, enabling efficient assembly/disassembly and recycling.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.